Theoretical analysis and optimization of electromagnetic actuation in a valveless microimpedance pump

Microelectronics Journal

Volumn 38, Issue 6-7, 2007, Pages 791-799

  Chang, Hsien Tsung ^a   Lee, Chia Yen ^a   Wen, Chih Yung ^b   Hong, Boe Shong ^c  

^a DA YEH UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

Author keywords

Electromagnetic actuator; Liebau phenomenon; Microelectro mechanical system (MEMS); PDMS diaphragm; Valveless microimpedance pump

Indexed keywords

ELECTRIC COILS; ELECTROMAGNETIC DISPERSION; ELECTROPLATING; FINITE ELEMENT METHOD; OPTIMIZATION; PERMANENT MAGNETS;

ELECTROMAGNETIC ACTUATORS; FLUID DRIVES; LIEBAU PHENOMENON; PDMS DIAPHRAGM; VALVELESS MICROIMPEDANCE PUMPS;

ACTUATORS;

EID: 34547567571     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.04.013     Document Type: Article

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