A diode-based two-wire solution for temperature-compensated piezoresistive pressure sensors

IEEE Transactions on Electron Devices

Volumn 50, Issue 2, 2003, Pages 503-509

  Melvås, Patrik ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Force transducing beam; Miniaturized; Pressure sensor; Temperature compensation

Indexed keywords

DIODES; PIEZOELECTRIC DEVICES; PRESSURE EFFECTS; THERMAL EFFECTS; WIRE;

PRESSURE SENSORS;

MICROSENSORS;

EID: 0038056274     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2003.809026     Document Type: Article

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