Surface micromachining technology applied to the fabrication of a FET pressure sensor

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 80-83

  Svensson, L ^a   Plaza, J A ^a   Benitez, M A ^a   Esteve, J ^a   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

GATES (TRANSISTOR); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

SURFACE MICROMACHINED PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 0030091861     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/018     Document Type: Article

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