Characteristics of a micromachined piezovalve combined with a multilayer ceramic actuator

Microelectronics Journal

Volumn 38, Issue 6-7, 2007, Pages 690-694

  Chung, Gwiy Sang ^a   Han, Ki Bong ^a  

^a University of Ulsan   (South Korea)

Author keywords

Buckling effect; Flow rate; Microvalve; Multilayer ceramic actuator; Piezoelectric

Indexed keywords

AUTOMOTIVE INDUSTRY; BUCKLING; DIES; FLOW RATE; MICROMACHINING; MULTILAYERS;

BUCKLING EFFECTS; MICROVALVES; MULTILAYER CERAMIC ACTUATOR (MCA);

PIEZOELECTRIC ACTUATORS;

EID: 34547578091     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.05.009     Document Type: Article

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