Nondestructive measurement of machining-induced amorphous layers in single-crystal silicon by laser micro-Raman spectroscopy

Precision Engineering

Volumn 32, Issue 3, 2008, Pages 186-195

  Yan, Jiwang ^a   Asami, Tooru ^a   Kuriyagawa, Tsunemoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Amorphous; Ductile machining; Laser micro Raman; Nondestructive evaluation; Phase transformation; Silicon; Subsurface damage; Ultraprecision machining

Indexed keywords

LASER RADIATION; RAMAN SPECTROSCOPY; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

DUCTILE MACHINING; NONDESTRUCTIVE EVALUATION; ULTRAPRECISION MACHINING;

SILICON WAFERS;

EID: 43049097178     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.08.006     Document Type: Article

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