Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers

Applied Physics Letters

Volumn 87, Issue 21, 2005, Pages 1-3

  Yan, Jiwang ^a   Takahashi, Hirokazu ^b   Tamaki, Jun'ichi ^b   Gai, Xiaohui ^a   Kuriyagawa, Tsunemoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DUCTILITY; INDENTATION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PLASTICITY; RECRYSTALLIZATION (METALLURGY); TRANSMISSION ELECTRON MICROSCOPY;

AMORPHOUS LAYERS; DIAMOND INDENTER; MICROSCOPIC SURFACE; NANOINDENTATION;

SILICON WAFERS;

EID: 27844516682     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2133908     Document Type: Article

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