Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method;Fabrication of large-diameter single-crystal silicon aspheric lens by straight-line enveloping diamond-turning method

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 68, Issue 4, 2002, Pages 561-565

  Van, Jiwang ^a   Syoji, Katsuo ^a   Kuriyagawa, Tsunemoto ^a  

^a NONE

Author keywords

Aspheric surface; Diamond turning; Ductile regime machining; Lens; Optical component; Single crystal silicon; Ultra precision machining

Indexed keywords

DIAMONDS; PRECISION ENGINEERING; SILICON; SINGLE CRYSTALS; SURFACE ROUGHNESS;

ASPHERIC SURFACE; DIAMOND TURNING; OPTICAL COMPONENT; ULTRA-PRECISION MACHINING;

LENSES;

EID: 31344439835     PISSN: 09120289     EISSN: None     Source Type: Journal    
DOI: 10.2493/jjspe.68.561     Document Type: Article

References (9)