Response of machining-damaged single-crystalline silicon wafers to nanosecond pulsed laser irradiation

Semiconductor Science and Technology

Volumn 22, Issue 4, 2007, Pages 392-395

  Yan, Jiwang ^a   Asami, Tooru ^a   Kuriyagawa, Tsunemoto ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DIAMONDS; IRRADIATION; LASER PULSES; SINGLE CRYSTALS;

CRYSTALLINE LAYERS; CRYSTALLINE PERFECTION; SINGLE CRYSTALLINE STRUCTURE; ULTRAPRECISION DIAMOND MACHINED SILICON WAFERS;

SILICON WAFERS;

EID: 34047224220     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/4/016     Document Type: Article

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