SCOPUS 정보 검색 플랫폼

Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering

Volumn 65, Issue 7, 1999, Pages 1008-1012

Chip morphology of ultra-precision diamond turning of single crystal silicon

(3) Yan, Jiwang a Syoji, Katsuo a Kuriyagawa, Tsunemoto a

a NONE

Author keywords

Brittle ductile transition; Chip morphology; Crystallographic anisotropy; Ductile regime machining; Single crystal silicon; Surface texture; Ultra precision diamond turning

Indexed keywords

EID: 0042536524 PISSN: 09120289 EISSN: None Source Type: Journal
DOI: 10.2493/jjspe.65.1008 Document Type: Article

Times cited : (16)

References (10)

1
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2
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- Ductile Regime Machining of Germanium and Silicon
- P.N. Blake and R. O. Scattergood : Ductile Regime Machining of Germanium and Silicon, J. Amer. Ceram. Soc., 73, 4 (1990) 949.
- (1990) J. Amer. Ceram. Soc. , vol.73 , Issue.4 , pp. 949
- Blake, P.N.¹ Scattergood, R.O.²

3
- 0001968603
- Diamond Turning of Brittle Materials for Optical Components
- T. Nakasuji, S. Kodera, S. Hara, H. Matsunaga, N. Ikawa and S. Shimada : Diamond Turning of Brittle Materials for Optical Components, Ann. CIRP, 39, 1 (1990) 89.
- (1990) Ann. CIRP , vol.39 , Issue.1 , pp. 89
- Nakasuji, T.¹ Kodera, S.² Hara, S.³ Matsunaga, H.⁴ Ikawa, N.⁵ Shimada, S.⁶

4
- 31344471274
- Japanese source

5
- 31344475776
- Japanese source

6
- 31344482577
- Japanese source

7
- 31344440044
- Japanese source

8
- 58149367510
- Machining Characteristics of Hard Brittle Materials
- K. Nakayama, M. Arai and T. Kanda: Machining Characteristics of Hard Brittle Materials, Ann. CIRP, 37, 1 (1988) 89.
- (1988) Ann. CIRP , vol.37 , Issue.1 , pp. 89
- Nakayama, K.¹ Arai, M.² Kanda, T.³

9
- 31344466017
- Japanese source

10
- 31344473486
- Japanese source

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.