SCOPUS 정보 검색 플랫폼

Journal of Materials Processing Technology

Volumn 84, Issue 1-3, 1998, Pages 149-158

Effect of ultraprecision grinding on the microstructural change in silicon monocrystals

(2) Zarudi, I a Zhang, L C a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

Amorphous; Silicon; Subsurface structure; Ultraprecision grinding

Indexed keywords

SILICON MONOCRYSTAL; SUBSURFACE STRUCTURE; ULTRAPRECISION GRINDING;

AMORPHOUS SILICON; CARBON; CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); DUCTILITY; MICROCRACKS; OXYGEN; PHASE TRANSITIONS; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE STRUCTURE;

GRINDING (MACHINING);

EID: 0032305772 PISSN: 09240136 EISSN: None Source Type: Journal
DOI: 10.1016/S0924-0136(98)00090-9 Document Type: Article

Times cited : (91)

References (18)

1
- 0030126689
- I. Zarudi, L.C. Zhang, J. Mater. Sci. Lett. 15 (1996) 586-587.
- (1996) J. Mater. Sci. Lett. , vol.15 , pp. 586-587
- Zarudi, I.¹ Zhang, L.C.²

2
- 0030151697
- R.R. Kunz, H.R. Clark, P.M. Nitishin, M. Rotschild, B.S. Ahern, J. Mater. Res. 11 (1996) 1228-1237.
- (1996) J. Mater. Res. , vol.11 , pp. 1228-1237
- Kunz, R.R.¹ Clark, H.R.² Nitishin, P.M.³ Rotschild, M.⁴ Ahern, B.S.⁵

3
- 0030127076
- S. Takayuki, F. Shigeru, M. Eiji, I. Masayuki, Prec. Eng. 18 (1996) 129-137.
- (1996) Prec. Eng. , vol.18 , pp. 129-137
- Takayuki, S.¹ Shigeru, F.² Eiji, M.³ Masayuki, I.⁴

4
- 0025414837
- P.N. Blake, R.O. Scattergood, J. Am. Ceram. Soc. 73 (1990) 949-957.
- (1990) J. Am. Ceram. Soc. , vol.73 , pp. 949-957
- Blake, P.N.¹ Scattergood, R.O.²

5
- 0029488985
- T.R. Mchedlidze, I. Yonenaga, K. Sumino, Mater. Sci. Forum 196-201 (1995) 1841-1846.
- (1995) Mater. Sci. Forum , vol.196-201 , pp. 1841-1846
- Mchedlidze, T.R.¹ Yonenaga, I.² Sumino, K.³

6
- 0030082826
- I. Zarudi, L.C. Zhang, Y.-W. Mai, J. Mater. Sci. 31 (1996) 905-914.
- (1996) J. Mater. Sci. , vol.31 , pp. 905-914
- Zarudi, I.¹ Zhang, L.C.² Mai, Y.-W.³

7
- 11544342667
- Advances in Abrasive Technology
- in press
- H. Tanaka, L.C. Zhang. Advances in Abrasive Technology, Proc. Int. Symp., 1997, (in press).
- (1997) Proc. Int. Symp.
- Tanaka, H.¹ Zhang, L.C.²

8
- 11544264795
- I. Zarudi, L.C. Zhang, Proc. 10th ASPE (1995) 163-166.
- (1995) Proc. 10th ASPE , pp. 163-166
- Zarudi, I.¹ Zhang, L.C.²

9
- 11544268411
- I. Zarudi, Proc. 11th ASPE (1996) 610-613.
- (1996) Proc. 11th ASPE , pp. 610-613
- Zarudi, I.¹

10
- 0027625418
- D.E. Kim, N.P. Sun, J. Mater. Sci. 28 (1993) 3895-3899.
- (1993) J. Mater. Sci. , vol.28 , pp. 3895-3899
- Kim, D.E.¹ Sun, N.P.²

11
- 0024736252
- T.S. Gross, V.K. Mathews, R.J. De Angelis, K. Okazaki, Mater. Sci. Eng. 117 (1989) 75-82.
- (1989) Mater. Sci. Eng. , vol.117 , pp. 75-82
- Gross, T.S.¹ Mathews, V.K.² De Angelis, R.J.³ Okazaki, K.⁴

12
- 0027595361
- V.P. Kisel, Mater. Sci. Eng. 164 (1993) 356-359.
- (1993) Mater. Sci. Eng. , vol.164 , pp. 356-359
- Kisel, V.P.¹

13
- 0001763779
- L.C. Zhang, T. Suto, H. Noguchi, T. Waida, Manufact. Rev. 5 (1992) 261-273.
- (1992) Manufact. Rev. , vol.5 , pp. 261-273
- Zhang, L.C.¹ Suto, T.² Noguchi, H.³ Waida, T.⁴

14
- 0004412417
- M.H. Aliabadi, C.A. Brebbia (Eds)
- L.C. Zhang, T. Suto, H. Noguchi, T. Waida, in: M.H. Aliabadi, C.A. Brebbia (Eds), Computer Methods and Experimental Measurements for Surface Treatment Effects, 1993, pp. 275-284.
- (1993) Computer Methods and Experimental Measurements for Surface Treatment Effects , pp. 275-284
- Zhang, L.C.¹ Suto, T.² Noguchi, H.³ Waida, T.⁴

15
- 0000525934
- L.C. Zhang, M. Mahdi, Int. J. Machine Tools Manufact. 35 (1995) 1397-1409.
- (1995) Int. J. Machine Tools Manufact. , vol.35 , pp. 1397-1409
- Zhang, L.C.¹ Mahdi, M.²

16
- 0031141095
- M. Mahdi, L.C. Zhang, Int. J. Machine Tools Manufact. 37 (1997) 619-633.
- (1997) Int. J. Machine Tools Manufact. , vol.37 , pp. 619-633
- Mahdi, M.¹ Zhang, L.C.²

17
- 0029345932
- M. Mahdi, L.C. Zhang, Comput. Struct. 56 (1995) 313-320.
- (1995) Comput. Struct. , vol.56 , pp. 313-320
- Mahdi, M.¹ Zhang, L.C.²

18
- 0344001030
- Macmillan, London
- J.W. Edington, Typical Electron Microscope Investigation, Macmillan, London, 1976.
- (1976) Typical Electron Microscope Investigation
- Edington, J.W.¹

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