-
1
-
-
0035352065
-
Mechanical deformation in silicon by micro-indentation
-
J.G. Bradby, J.S. Williams, J. Wong-Leung, M.V. Swain, and P. Munroe: Mechanical deformation in silicon by micro-indentation. J. Mater. Res. 16, 1500 (2001).
-
(2001)
J. Mater. Res
, vol.16
, pp. 1500
-
-
Bradby, J.G.1
Williams, J.S.2
Wong-Leung, J.3
Swain, M.V.4
Munroe, P.5
-
2
-
-
0037055303
-
Spherical indentation of compound semiconductors
-
J.G. Bradby, J.S. Williams, J. Wong-Leung, S.O. Kucheyev, M.V. Swain, and P. Munroe: Spherical indentation of compound semiconductors. Philos. Mag. A 82, 1931 (2002).
-
(2002)
Philos. Mag. A
, vol.82
, pp. 1931
-
-
Bradby, J.G.1
Williams, J.S.2
Wong-Leung, J.3
Kucheyev, S.O.4
Swain, M.V.5
Munroe, P.6
-
3
-
-
0038004939
-
Microstructure evolution in monocrystalline silicon in cyclic microindentations
-
I. Zarudi, L.C. Zhang, and M.V. Swain: Microstructure evolution in monocrystalline silicon in cyclic microindentations. J. Mater. Res. 18, 758 (2003).
-
(2003)
J. Mater. Res
, vol.18
, pp. 758
-
-
Zarudi, I.1
Zhang, L.C.2
Swain, M.V.3
-
4
-
-
0037450216
-
Behavior of monocrystalline silicon under cyclic microindentations with a spherical indenter
-
I. Zarudi, L.C. Zhang, and M.V. Swain: Behavior of monocrystalline silicon under cyclic microindentations with a spherical indenter. Appl. Phys. Lett. 82, 1027 (2003).
-
(2003)
Appl. Phys. Lett
, vol.82
, pp. 1027
-
-
Zarudi, I.1
Zhang, L.C.2
Swain, M.V.3
-
5
-
-
0036936443
-
Effect of water on the mechanical response of monocrystalline silicon to repeated microindentation
-
I. Zarudi, L.C. Zhang, and M.V. Swain: Effect of water on the mechanical response of monocrystalline silicon to repeated microindentation. Key Eng. Mater. 233-236, 609 (2003).
-
(2003)
Key Eng. Mater
, vol.233-236
, pp. 609
-
-
Zarudi, I.1
Zhang, L.C.2
Swain, M.V.3
-
6
-
-
4344710763
-
Amorphous structures induced in monocrystalline silicon by mechanical loading
-
I. Zarudi, J. Zou, W. McBride, and L.C, Zhang: Amorphous structures induced in monocrystalline silicon by mechanical loading. Appl. Phys. Lett. 85, 932 (2004).
-
(2004)
Appl. Phys. Lett
, vol.85
, pp. 932
-
-
Zarudi, I.1
Zou, J.2
McBride, W.3
Zhang, L.C.4
-
7
-
-
2942669481
-
Fracture and deformation in brittle solids: A perspective on the issue of scale
-
B.R. Lawn: Fracture and deformation in brittle solids: A perspective on the issue of scale. J. Mater. Res. 19, 22 (2004).
-
(2004)
J. Mater. Res
, vol.19
, pp. 22
-
-
Lawn, B.R.1
-
8
-
-
2942650505
-
Strength of silicon, sapphire and glass in the subthreshold flaw region
-
Y-G. Jung, A. Pajares, R. Banerjee, and B.R. Lawn: Strength of silicon, sapphire and glass in the subthreshold flaw region. Acta Mater. 52, 3459 (2004).
-
(2004)
Acta Mater
, vol.52
, pp. 3459
-
-
Jung, Y.-G.1
Pajares, A.2
Banerjee, R.3
Lawn, B.R.4
-
9
-
-
33644550984
-
Strength and sharp contact fracture of silicon
-
R.F. Cook: Strength and sharp contact fracture of silicon. J. Mater. Sci. 41, 841 (2006).
-
(2006)
J. Mater. Sci
, vol.41
, pp. 841
-
-
Cook, R.F.1
-
10
-
-
42949120489
-
Surface energy of germanium and silicon
-
R.J. Jaccodine: Surface energy of germanium and silicon. J. Electrochem. Soc. 109, C203 (1962).
-
(1962)
J. Electrochem. Soc
, vol.109
-
-
Jaccodine, R.J.1
-
12
-
-
84987297810
-
The fracture of single-crystal silicon under various environments
-
T.J. Chen and W.J. Knapp: The fracture of single-crystal silicon under various environments. J. Am. Ceram. Soc. 63, 225 (1980).
-
(1980)
J. Am. Ceram. Soc
, vol.63
, pp. 225
-
-
Chen, T.J.1
Knapp, W.J.2
-
13
-
-
0019586642
-
Mechanics of strength degrading flaws in silicon
-
B.R. Lawn, D.B. Marshall, and P. Chantikul: Mechanics of strength degrading flaws in silicon. J. Mater. Sci. 16, 1769 (1981).
-
(1981)
J. Mater. Sci
, vol.16
, pp. 1769
-
-
Lawn, B.R.1
Marshall, D.B.2
Chantikul, P.3
-
14
-
-
0019898001
-
A molecular interpretation of stress corrosion in silica
-
T.A. Michalske and S.W. Freiman: A molecular interpretation of stress corrosion in silica. Nature 295, 511 (1981).
-
(1981)
Nature
, vol.295
, pp. 511
-
-
Michalske, T.A.1
Freiman, S.W.2
-
15
-
-
6044256374
-
Fatigue crack growth in micromachined single-crystal silicon
-
E.D. Renuart, A.M. Fitzgerald, T.W. Kenny, and R.H. Dauskardt: Fatigue crack growth in micromachined single-crystal silicon. J. Mater. Res. 19, 2635 (2004).
-
(2004)
J. Mater. Res
, vol.19
, pp. 2635
-
-
Renuart, E.D.1
Fitzgerald, A.M.2
Kenny, T.W.3
Dauskardt, R.H.4
-
16
-
-
0031125510
-
The fracture toughness of polysilicon devices: A first report
-
R. Ballarini, R.L. Mullen, Y. Yin, H. Kahn, S. Stemmer, and A.H. Heuer: The fracture toughness of polysilicon devices: A first report. J. Mater. Res. 12, 915 (1997).
-
(1997)
J. Mater. Res
, vol.12
, pp. 915
-
-
Ballarini, R.1
Mullen, R.L.2
Yin, Y.3
Kahn, H.4
Stemmer, S.5
Heuer, A.H.6
-
17
-
-
33746470278
-
Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens
-
H. Kahn, R. Ballarini, R.L. Mullen, and A.H. Heuer: Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens. Proc. R. Soc. London Ser. A 455, 3807 (1999).
-
(1999)
Proc. R. Soc. London Ser. A
, vol.455
, pp. 3807
-
-
Kahn, H.1
Ballarini, R.2
Mullen, R.L.3
Heuer, A.H.4
-
18
-
-
0033749085
-
Fracture toughness of polysilicon MEMS devices
-
H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen, and A.H. Heuer: Fracture toughness of polysilicon MEMS devices. Sens. Actuators, A 82, 274 (2000).
-
(2000)
Sens. Actuators, A
, vol.82
, pp. 274
-
-
Kahn, H.1
Tayebi, N.2
Ballarini, R.3
Mullen, R.L.4
Heuer, A.H.5
-
19
-
-
0037044914
-
Fatigue failure in polysilicon not due to simple stress corrosion cracking
-
H. Kahn, R. Ballarini, J.J. Bellante, and A.H. Heuer: Fatigue failure in polysilicon not due to simple stress corrosion cracking. Science 298, 1215 (2002).
-
(2002)
Science
, vol.298
, pp. 1215
-
-
Kahn, H.1
Ballarini, R.2
Bellante, J.J.3
Heuer, A.H.4
-
21
-
-
0035923338
-
High-cycle fatigue and durability of polycrystalline silicon thin films in air
-
C.L. Muhlstein, S.B. Brown, and R.O. Ritchie: High-cycle fatigue and durability of polycrystalline silicon thin films in air. Sens. Actuators, A 94, 177 (2001).
-
(2001)
Sens. Actuators, A
, vol.94
, pp. 177
-
-
Muhlstein, C.L.1
Brown, S.B.2
Ritchie, R.O.3
-
22
-
-
0037119073
-
A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
-
C.L. Muhlstein, E.A. Stach, and R.O. Ritchie: A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading. Acta Mater. 50, 3579 (2002).
-
(2002)
Acta Mater
, vol.50
, pp. 3579
-
-
Muhlstein, C.L.1
Stach, E.A.2
Ritchie, R.O.3
-
23
-
-
0141940247
-
Fatigue damage evolution in silicon films for micromechanical applications
-
P. Shrotriya, S. Allameh, S. Brown, Z. Suo, and W.O. Soboyejo: Fatigue damage evolution in silicon films for micromechanical applications. Exp. Mech. 43, 289 (2003).
-
(2003)
Exp. Mech
, vol.43
, pp. 289
-
-
Shrotriya, P.1
Allameh, S.2
Brown, S.3
Suo, Z.4
Soboyejo, W.O.5
-
24
-
-
33847059674
-
Mechanisms for fatigue of micron-scale silicon structural films
-
D.A. Alsem, O.N. Pierron, E.A. Stach, C.L. Muhlstein, and R.O. Ritchie: Mechanisms for fatigue of micron-scale silicon structural films. Adv. Eng. Mater. 9, 15 (2007).
-
(2007)
Adv. Eng. Mater
, vol.9
, pp. 15
-
-
Alsem, D.A.1
Pierron, O.N.2
Stach, E.A.3
Muhlstein, C.L.4
Ritchie, R.O.5
-
25
-
-
33846324417
-
The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films
-
O.N. Pierron and C.L. Muhlstein: The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films. Fatigue Fract. Eng. Mater. Struct. 30, 57 (2007).
-
(2007)
Fatigue Fract. Eng. Mater. Struct
, vol.30
, pp. 57
-
-
Pierron, O.N.1
Muhlstein, C.L.2
-
26
-
-
33644577266
-
Hertzian fracture in single crystals with the diamond structure
-
B.R. Lawn: Hertzian fracture in single crystals with the diamond structure. J. Appl. Phys. 39, 4828 (1968).
-
(1968)
J. Appl. Phys
, vol.39
, pp. 4828
-
-
Lawn, B.R.1
-
27
-
-
0032137856
-
Indentation of ceramics with spheres: A century after Hertz
-
B.R. Lawn: Indentation of ceramics with spheres: A century after Hertz. J. Am. Ceram. Soc. 81, 1977 (1998).
-
(1998)
J. Am. Ceram. Soc
, vol.81
, pp. 1977
-
-
Lawn, B.R.1
-
29
-
-
0032595445
-
Fracture modes in brittle coatings with large interlayer modulus mismatch
-
H. Chai, B.R. Lawn, and S. Wuttiphan: Fracture modes in brittle coatings with large interlayer modulus mismatch. J. Mater. Res. 14, 3805 (1999).
-
(1999)
J. Mater. Res
, vol.14
, pp. 3805
-
-
Chai, H.1
Lawn, B.R.2
Wuttiphan, S.3
-
30
-
-
0042170394
-
Designing damage-resistant brittle-coating structures: I. Bilayers
-
P. Miranda, A. Pajares, F. Guiberteau, Y. Deng, and B.R. Lawn: Designing damage-resistant brittle-coating structures: I. Bilayers. Acta Mater. 51, 4347 (2003).
-
(2003)
Acta Mater
, vol.51
, pp. 4347
-
-
Miranda, P.1
Pajares, A.2
Guiberteau, F.3
Deng, Y.4
Lawn, B.R.5
-
31
-
-
0012051478
-
Pressure crack figures on diamond faces: I. The octahedral face
-
V.R. Howes and S. Tolansky: Pressure crack figures on diamond faces: I. The octahedral face. Proc. R. Soc. London Ser. A 230, 287 (1955).
-
(1955)
Proc. R. Soc. London Ser. A
, vol.230
, pp. 287
-
-
Howes, V.R.1
Tolansky, S.2
-
32
-
-
0012048668
-
Pressure crack figures on diamond faces: II. The dodecahedral and cubic faces
-
V.R. Howes and S. Tolansky: Pressure crack figures on diamond faces: II. The dodecahedral and cubic faces. Proc. R. Soc. London Ser. A 230, 294 (1955).
-
(1955)
Proc. R. Soc. London Ser. A
, vol.230
, pp. 294
-
-
Howes, V.R.1
Tolansky, S.2
-
33
-
-
85040875608
-
-
Cambridge University Press, London, UK
-
K.L. Johnson: Contact Mechanics (Cambridge University Press, London, UK, 1985).
-
(1985)
Contact Mechanics
-
-
Johnson, K.L.1
-
35
-
-
0034229863
-
Fracture strength and fatigue of polysilicon determined by a novel thermal actuator
-
H. Kapels, R. Aigner, and J. Binder: Fracture strength and fatigue of polysilicon determined by a novel thermal actuator. IEEE Trans. Electron Dev. 47, 1522 (2000).
-
(2000)
IEEE Trans. Electron Dev
, vol.47
, pp. 1522
-
-
Kapels, H.1
Aigner, R.2
Binder, J.3
-
36
-
-
0035441291
-
Effect of specimen size on young's modulus and fracture strength of polysilicon
-
W.N. Sharpe, K.M. Jackson, K.J. Hemker, and Z.L. Xie: Effect of specimen size on young's modulus and fracture strength of polysilicon. J. Microelectromech. Syst. 10, 317 (2001).
-
(2001)
J. Microelectromech. Syst
, vol.10
, pp. 317
-
-
Sharpe, W.N.1
Jackson, K.M.2
Hemker, K.J.3
Xie, Z.L.4
-
37
-
-
0037438920
-
Fatigue of polycrystalline silicon under long-term cyclic loading
-
N. Bagdahn and W.N. Sharpe: Fatigue of polycrystalline silicon under long-term cyclic loading. Sens. Actuators, A: Phys. 103, 9 (2003).
-
(2003)
Sens. Actuators, A: Phys
, vol.103
, pp. 9
-
-
Bagdahn, N.1
Sharpe, W.N.2
-
39
-
-
0025958647
-
Cyclic fatigue from frictional degradation at bridging grains in alumina
-
S. Lathabai, J. Rödel, and B.R. Lawn: Cyclic fatigue from frictional degradation at bridging grains in alumina. J. Am. Ceram. Soc. 74, 1340 (1991).
-
(1991)
J. Am. Ceram. Soc
, vol.74
, pp. 1340
-
-
Lathabai, S.1
Rödel, J.2
Lawn, B.R.3
-
40
-
-
0028375917
-
Making ceramics 'ductile'
-
B.R. Lawn, N.P. Padture, H. Cai, and F. Guiberteau: Making ceramics 'ductile'. Science 263, 1114 (1994).
-
(1994)
Science
, vol.263
, pp. 1114
-
-
Lawn, B.R.1
Padture, N.P.2
Cai, H.3
Guiberteau, F.4
-
41
-
-
0029326204
-
Contact fatigue of a silicon carbide with a heterogeneous grain structure
-
N.P. Padture and B.R. Lawn: Contact fatigue of a silicon carbide with a heterogeneous grain structure. J. Am. Ceram. Soc. 78, 1431 (1995).
-
(1995)
J. Am. Ceram. Soc
, vol.78
, pp. 1431
-
-
Padture, N.P.1
Lawn, B.R.2
-
43
-
-
0000105655
-
Partial cone crack formation in a brittle material loaded with a sliding indenter
-
B.R. Lawn: Partial cone crack formation in a brittle material loaded with a sliding indenter. Proc. R. Soc. London Ser. A 299, 307 (1967).
-
(1967)
Proc. R. Soc. London Ser. A
, vol.299
, pp. 307
-
-
Lawn, B.R.1
|