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Volumn 23, Issue 4, 2008, Pages 1175-1184

Contact fatigue of silicon

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; CYCLIC LOADS; FATIGUE DAMAGE; INDENTATION; STRENGTH OF MATERIALS;

EID: 42949095168     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2008.0149     Document Type: Article
Times cited : (6)

References (43)
  • 3
    • 0038004939 scopus 로고    scopus 로고
    • Microstructure evolution in monocrystalline silicon in cyclic microindentations
    • I. Zarudi, L.C. Zhang, and M.V. Swain: Microstructure evolution in monocrystalline silicon in cyclic microindentations. J. Mater. Res. 18, 758 (2003).
    • (2003) J. Mater. Res , vol.18 , pp. 758
    • Zarudi, I.1    Zhang, L.C.2    Swain, M.V.3
  • 4
    • 0037450216 scopus 로고    scopus 로고
    • Behavior of monocrystalline silicon under cyclic microindentations with a spherical indenter
    • I. Zarudi, L.C. Zhang, and M.V. Swain: Behavior of monocrystalline silicon under cyclic microindentations with a spherical indenter. Appl. Phys. Lett. 82, 1027 (2003).
    • (2003) Appl. Phys. Lett , vol.82 , pp. 1027
    • Zarudi, I.1    Zhang, L.C.2    Swain, M.V.3
  • 5
    • 0036936443 scopus 로고    scopus 로고
    • Effect of water on the mechanical response of monocrystalline silicon to repeated microindentation
    • I. Zarudi, L.C. Zhang, and M.V. Swain: Effect of water on the mechanical response of monocrystalline silicon to repeated microindentation. Key Eng. Mater. 233-236, 609 (2003).
    • (2003) Key Eng. Mater , vol.233-236 , pp. 609
    • Zarudi, I.1    Zhang, L.C.2    Swain, M.V.3
  • 6
    • 4344710763 scopus 로고    scopus 로고
    • Amorphous structures induced in monocrystalline silicon by mechanical loading
    • I. Zarudi, J. Zou, W. McBride, and L.C, Zhang: Amorphous structures induced in monocrystalline silicon by mechanical loading. Appl. Phys. Lett. 85, 932 (2004).
    • (2004) Appl. Phys. Lett , vol.85 , pp. 932
    • Zarudi, I.1    Zou, J.2    McBride, W.3    Zhang, L.C.4
  • 7
    • 2942669481 scopus 로고    scopus 로고
    • Fracture and deformation in brittle solids: A perspective on the issue of scale
    • B.R. Lawn: Fracture and deformation in brittle solids: A perspective on the issue of scale. J. Mater. Res. 19, 22 (2004).
    • (2004) J. Mater. Res , vol.19 , pp. 22
    • Lawn, B.R.1
  • 8
    • 2942650505 scopus 로고    scopus 로고
    • Strength of silicon, sapphire and glass in the subthreshold flaw region
    • Y-G. Jung, A. Pajares, R. Banerjee, and B.R. Lawn: Strength of silicon, sapphire and glass in the subthreshold flaw region. Acta Mater. 52, 3459 (2004).
    • (2004) Acta Mater , vol.52 , pp. 3459
    • Jung, Y.-G.1    Pajares, A.2    Banerjee, R.3    Lawn, B.R.4
  • 9
    • 33644550984 scopus 로고    scopus 로고
    • Strength and sharp contact fracture of silicon
    • R.F. Cook: Strength and sharp contact fracture of silicon. J. Mater. Sci. 41, 841 (2006).
    • (2006) J. Mater. Sci , vol.41 , pp. 841
    • Cook, R.F.1
  • 10
    • 42949120489 scopus 로고
    • Surface energy of germanium and silicon
    • R.J. Jaccodine: Surface energy of germanium and silicon. J. Electrochem. Soc. 109, C203 (1962).
    • (1962) J. Electrochem. Soc , vol.109
    • Jaccodine, R.J.1
  • 12
    • 84987297810 scopus 로고
    • The fracture of single-crystal silicon under various environments
    • T.J. Chen and W.J. Knapp: The fracture of single-crystal silicon under various environments. J. Am. Ceram. Soc. 63, 225 (1980).
    • (1980) J. Am. Ceram. Soc , vol.63 , pp. 225
    • Chen, T.J.1    Knapp, W.J.2
  • 13
    • 0019586642 scopus 로고
    • Mechanics of strength degrading flaws in silicon
    • B.R. Lawn, D.B. Marshall, and P. Chantikul: Mechanics of strength degrading flaws in silicon. J. Mater. Sci. 16, 1769 (1981).
    • (1981) J. Mater. Sci , vol.16 , pp. 1769
    • Lawn, B.R.1    Marshall, D.B.2    Chantikul, P.3
  • 14
    • 0019898001 scopus 로고
    • A molecular interpretation of stress corrosion in silica
    • T.A. Michalske and S.W. Freiman: A molecular interpretation of stress corrosion in silica. Nature 295, 511 (1981).
    • (1981) Nature , vol.295 , pp. 511
    • Michalske, T.A.1    Freiman, S.W.2
  • 17
    • 33746470278 scopus 로고    scopus 로고
    • Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens
    • H. Kahn, R. Ballarini, R.L. Mullen, and A.H. Heuer: Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens. Proc. R. Soc. London Ser. A 455, 3807 (1999).
    • (1999) Proc. R. Soc. London Ser. A , vol.455 , pp. 3807
    • Kahn, H.1    Ballarini, R.2    Mullen, R.L.3    Heuer, A.H.4
  • 19
    • 0037044914 scopus 로고    scopus 로고
    • Fatigue failure in polysilicon not due to simple stress corrosion cracking
    • H. Kahn, R. Ballarini, J.J. Bellante, and A.H. Heuer: Fatigue failure in polysilicon not due to simple stress corrosion cracking. Science 298, 1215 (2002).
    • (2002) Science , vol.298 , pp. 1215
    • Kahn, H.1    Ballarini, R.2    Bellante, J.J.3    Heuer, A.H.4
  • 21
    • 0035923338 scopus 로고    scopus 로고
    • High-cycle fatigue and durability of polycrystalline silicon thin films in air
    • C.L. Muhlstein, S.B. Brown, and R.O. Ritchie: High-cycle fatigue and durability of polycrystalline silicon thin films in air. Sens. Actuators, A 94, 177 (2001).
    • (2001) Sens. Actuators, A , vol.94 , pp. 177
    • Muhlstein, C.L.1    Brown, S.B.2    Ritchie, R.O.3
  • 22
    • 0037119073 scopus 로고    scopus 로고
    • A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading
    • C.L. Muhlstein, E.A. Stach, and R.O. Ritchie: A reaction-layer mechanism for the delayed failure of micron-scale polycrystalline silicon structural films subjected to high-cycle fatigue loading. Acta Mater. 50, 3579 (2002).
    • (2002) Acta Mater , vol.50 , pp. 3579
    • Muhlstein, C.L.1    Stach, E.A.2    Ritchie, R.O.3
  • 23
    • 0141940247 scopus 로고    scopus 로고
    • Fatigue damage evolution in silicon films for micromechanical applications
    • P. Shrotriya, S. Allameh, S. Brown, Z. Suo, and W.O. Soboyejo: Fatigue damage evolution in silicon films for micromechanical applications. Exp. Mech. 43, 289 (2003).
    • (2003) Exp. Mech , vol.43 , pp. 289
    • Shrotriya, P.1    Allameh, S.2    Brown, S.3    Suo, Z.4    Soboyejo, W.O.5
  • 25
    • 33846324417 scopus 로고    scopus 로고
    • The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films
    • O.N. Pierron and C.L. Muhlstein: The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films. Fatigue Fract. Eng. Mater. Struct. 30, 57 (2007).
    • (2007) Fatigue Fract. Eng. Mater. Struct , vol.30 , pp. 57
    • Pierron, O.N.1    Muhlstein, C.L.2
  • 26
    • 33644577266 scopus 로고
    • Hertzian fracture in single crystals with the diamond structure
    • B.R. Lawn: Hertzian fracture in single crystals with the diamond structure. J. Appl. Phys. 39, 4828 (1968).
    • (1968) J. Appl. Phys , vol.39 , pp. 4828
    • Lawn, B.R.1
  • 27
    • 0032137856 scopus 로고    scopus 로고
    • Indentation of ceramics with spheres: A century after Hertz
    • B.R. Lawn: Indentation of ceramics with spheres: A century after Hertz. J. Am. Ceram. Soc. 81, 1977 (1998).
    • (1998) J. Am. Ceram. Soc , vol.81 , pp. 1977
    • Lawn, B.R.1
  • 29
    • 0032595445 scopus 로고    scopus 로고
    • Fracture modes in brittle coatings with large interlayer modulus mismatch
    • H. Chai, B.R. Lawn, and S. Wuttiphan: Fracture modes in brittle coatings with large interlayer modulus mismatch. J. Mater. Res. 14, 3805 (1999).
    • (1999) J. Mater. Res , vol.14 , pp. 3805
    • Chai, H.1    Lawn, B.R.2    Wuttiphan, S.3
  • 30
    • 0042170394 scopus 로고    scopus 로고
    • Designing damage-resistant brittle-coating structures: I. Bilayers
    • P. Miranda, A. Pajares, F. Guiberteau, Y. Deng, and B.R. Lawn: Designing damage-resistant brittle-coating structures: I. Bilayers. Acta Mater. 51, 4347 (2003).
    • (2003) Acta Mater , vol.51 , pp. 4347
    • Miranda, P.1    Pajares, A.2    Guiberteau, F.3    Deng, Y.4    Lawn, B.R.5
  • 31
    • 0012051478 scopus 로고
    • Pressure crack figures on diamond faces: I. The octahedral face
    • V.R. Howes and S. Tolansky: Pressure crack figures on diamond faces: I. The octahedral face. Proc. R. Soc. London Ser. A 230, 287 (1955).
    • (1955) Proc. R. Soc. London Ser. A , vol.230 , pp. 287
    • Howes, V.R.1    Tolansky, S.2
  • 32
    • 0012048668 scopus 로고
    • Pressure crack figures on diamond faces: II. The dodecahedral and cubic faces
    • V.R. Howes and S. Tolansky: Pressure crack figures on diamond faces: II. The dodecahedral and cubic faces. Proc. R. Soc. London Ser. A 230, 294 (1955).
    • (1955) Proc. R. Soc. London Ser. A , vol.230 , pp. 294
    • Howes, V.R.1    Tolansky, S.2
  • 33
    • 85040875608 scopus 로고
    • Cambridge University Press, London, UK
    • K.L. Johnson: Contact Mechanics (Cambridge University Press, London, UK, 1985).
    • (1985) Contact Mechanics
    • Johnson, K.L.1
  • 35
    • 0034229863 scopus 로고    scopus 로고
    • Fracture strength and fatigue of polysilicon determined by a novel thermal actuator
    • H. Kapels, R. Aigner, and J. Binder: Fracture strength and fatigue of polysilicon determined by a novel thermal actuator. IEEE Trans. Electron Dev. 47, 1522 (2000).
    • (2000) IEEE Trans. Electron Dev , vol.47 , pp. 1522
    • Kapels, H.1    Aigner, R.2    Binder, J.3
  • 36
    • 0035441291 scopus 로고    scopus 로고
    • Effect of specimen size on young's modulus and fracture strength of polysilicon
    • W.N. Sharpe, K.M. Jackson, K.J. Hemker, and Z.L. Xie: Effect of specimen size on young's modulus and fracture strength of polysilicon. J. Microelectromech. Syst. 10, 317 (2001).
    • (2001) J. Microelectromech. Syst , vol.10 , pp. 317
    • Sharpe, W.N.1    Jackson, K.M.2    Hemker, K.J.3    Xie, Z.L.4
  • 37
    • 0037438920 scopus 로고    scopus 로고
    • Fatigue of polycrystalline silicon under long-term cyclic loading
    • N. Bagdahn and W.N. Sharpe: Fatigue of polycrystalline silicon under long-term cyclic loading. Sens. Actuators, A: Phys. 103, 9 (2003).
    • (2003) Sens. Actuators, A: Phys , vol.103 , pp. 9
    • Bagdahn, N.1    Sharpe, W.N.2
  • 39
    • 0025958647 scopus 로고
    • Cyclic fatigue from frictional degradation at bridging grains in alumina
    • S. Lathabai, J. Rödel, and B.R. Lawn: Cyclic fatigue from frictional degradation at bridging grains in alumina. J. Am. Ceram. Soc. 74, 1340 (1991).
    • (1991) J. Am. Ceram. Soc , vol.74 , pp. 1340
    • Lathabai, S.1    Rödel, J.2    Lawn, B.R.3
  • 41
    • 0029326204 scopus 로고
    • Contact fatigue of a silicon carbide with a heterogeneous grain structure
    • N.P. Padture and B.R. Lawn: Contact fatigue of a silicon carbide with a heterogeneous grain structure. J. Am. Ceram. Soc. 78, 1431 (1995).
    • (1995) J. Am. Ceram. Soc , vol.78 , pp. 1431
    • Padture, N.P.1    Lawn, B.R.2
  • 43
    • 0000105655 scopus 로고
    • Partial cone crack formation in a brittle material loaded with a sliding indenter
    • B.R. Lawn: Partial cone crack formation in a brittle material loaded with a sliding indenter. Proc. R. Soc. London Ser. A 299, 307 (1967).
    • (1967) Proc. R. Soc. London Ser. A , vol.299 , pp. 307
    • Lawn, B.R.1


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