Behavior of monocrystalline silicon under cyclic microindentations with a spherical indenter

Applied Physics Letters

Volumn 82, Issue 7, 2003, Pages 1027-1029

  Zarudi, I ^a   Zhang, L C ^a   Swain, M V ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELASTICITY; INDENTATION; LOADS (FORCES);

MONOCRYSTALLINE SILICON;

SILICON;

EID: 0037450216     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1541110     Document Type: Article

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