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Journal of Materials Research

Volumn 16, Issue 5, 2001, Pages 1500-1507

Mechanical deformation in silicon by micro-indentation

(5) Bradby, Jodie E a Williams, J S a Wong Leung, J a Swain, M V b Munroe, P c

a AUSTRALIAN NATIONAL UNIVERSITY (Australia)

b UNIVERSITY OF SYDNEY (Australia)

c UNIVERSITY OF NEW SOUTH WALES (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEFORMATION; HYDROSTATIC PRESSURE; INDENTATION; LOADS (FORCES); MICROSTRUCTURE; NUCLEATION; RAMAN SPECTROSCOPY; SHEAR STRESS; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY (XTEM);

CRYSTALLINE MATERIALS;

EID: 0035352065 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0209 Document Type: Article

Times cited : (249)

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