Effect of water on the mechanical response of monocrystalline silicon to repeated micro-indentation

Key Engineering Materials

Volumn 233-236, Issue II, 2002, Pages 609-614

  Zarudi, I ^a   Zhang, L C ^a   Swain, M V ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Mechanical properties; Monocrystalline silicon; Repeated indentation; Water

Indexed keywords

COMPOSITION EFFECTS; CRACK PROPAGATION; ELASTICITY; MECHANICAL PROPERTIES; MECHANICAL VARIABLES MEASUREMENT; PHASE TRANSITIONS; WATER;

MONOCRYSTALLINE SILICON; REPEATED MICRO-INDENTATION;

SILICON;

EID: 0036936443     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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