Design, modeling, fabrication and testing of a MEMS capacitive bending strain sensor

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 124-129

  Aebersold, J ^a   Walsh, K ^a   Crain, M ^a   Voor, M ^b   Martin, M ^a   Hnat, W ^a   Lin, J ^a   Jackson, D ^a   Naber, J ^a  

^a University of Louisville   (United States)

^b University of Louisville School of Medicine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744540751     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/021     Document Type: Article

References (7)

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2. Xiao Z, Peng W, Wolffenbuttel W F, Farmer K R 2003 Micromachined variable capacitors with wide tuning range Sensors Actuators: Phys. 104 299-305
3. Sun Y, Piyabongkarn D, Sezen A, Nelson B J, Rajamani R 2002 A high aspect ratio two-axis electrostatic microactuator with extended travel range Sensors Actuators: Phys. 102 49-60
4. Xie H, Pan Y, Fedder G 2003 A CMOS-MEMS Mirror With Curled-Hinge Comb Drives J. Microelectromechanical Syst. 12 (4) 450-457
5. Nguyen H, Hah D, Patterson P, Chao R, Piyawattanametha W, Lau E, Wu M C 2004 Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning Capabilities J. Microelectromechanical Syst.. 13 (3) 406
6. Hsu T 2002 MEMS & MICROSYSTEMS: Design and Manufacture (McGraw-Hill. New York) 246
7. Kovacs G 1998 Micromachined Transducers Sourcebook (McGraw-Hill, New York) p 219-220