A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices

Journal of Micromechanics and Microengineering

Volumn 17, Issue 4, 2007, Pages 828-834

  Van Spengen, W Merlijn ^a,b   Oosterkamp, Tjerk H ^a  

^a LEIDEN UNIVERSITY   (Netherlands)

^b Falco Systems   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; ELECTRIC DRIVES; INTEGRATED CIRCUIT LAYOUT; MICROMACHINING; MOTION CONTROL; SPURIOUS SIGNAL NOISE;

LCR-CIRCUITS; MEMS COMB DRIVES; PARASITIC CAPACITANCES; PEAK-TO-PEAK NOISE SENSITIVITY;

MEMS;

EID: 34249041698     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/4/021     Document Type: Conference Paper

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