Metallic micro displacement capacitive sensor fabricated by laser micromachining technology

Microsystem Technologies

Volumn 12, Issue 8, 2006, Pages 778-785

  Lai, Yongjun ^a,b   Bordatchev, Evgueni V ^a   Nikumb, Suwas K ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANCHORS; FABRICATION; LASERS; MICROMACHINING; TUNGSTEN;

FEMTOSECOND LASER MACHINING TECHNOLOGY; INERTIAL MASS; SUSPENSION SPRINGS; TUNGSTEN FOIL;

MICROSENSORS;

EID: 33744544381     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0151-x     Document Type: Article

References (11)

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