Surface micromachined capacitive pressure sensor for biomedical applications

Biennial University/Government/Industry Microelectronics Symposium - Proceedings

Volumn , Issue , 1997, Pages 150-153

  Babbitt, Kerstin E ^a   Fuller, Lynn ^a   Keller, Bradley ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; BIOSENSORS; CAPACITANCE MEASUREMENT; DATA ACQUISITION; ELECTRONIC EQUIPMENT MANUFACTURE; FREQUENCY MODULATION; FREQUENCY RESPONSE; MICROMACHINING; PRESSURE MEASUREMENT;

CAPACITIVE PRESSURE SENSORS;

PRESSURE TRANSDUCERS;

EID: 0031385093     PISSN: 07496877     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)