MEMS process characterization with an on-chip device

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings

Volumn 3, Issue , 2006, Pages 550-553

  Garmire, D ^a   Choo, H ^a   Muller, R S ^a   Govindjee, S ^a   Demmel, J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

In situ characterization; Metrology

Indexed keywords

CAPACITANCE MEASUREMENT; CHIP SCALE PACKAGES; ELASTIC MODULI; NONDESTRUCTIVE EXAMINATION; SILICON ON INSULATOR TECHNOLOGY; THERMAL EXPANSION;

ACTUATION PARAMETERS; CANTILEVERED SHUTTLES; PROCESS CHARACTERIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 33845227644     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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