A micromachined capacitive incremental position sensor: Part 2. Experimental assessment

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Kuijpers, A A ^a   Krijnen, G J M ^a   Wiegerink, R J ^a   Lammerink, T S J ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITANCE; CAPACITANCE MEASUREMENT; COMPUTATIONAL GEOMETRY; CONTROL NONLINEARITIES; MICROMACHINING;

ACTUATION VOLTAGES; CAPACITIVE INCREMENTAL POSITION SENSORS; INCREMENTAL CAPACITANCE MEASUREMENT MODE (ICCM);

SENSORS;

EID: 33646735759     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S19     Document Type: Article

References (16)

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