An oversampled capacitance-to-voltage converter IC with application to time-domain characterization of MEMS resonators

IEEE Sensors Journal

Volumn 5, Issue 6, 2005, Pages 1353-1361

  Lei, Shuyu ^b   Zorman, Christian A ^c,d   Garverick, Steven L ^a  

^a IEEE   (United States)

^b Power One Inc   (United States)

^c Case Western Reserve University   (United States)

^d CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

Capacitor to voltage (C to V) converter; Delta modulator; Double sampling; Microelectromechanical systems (MEMS) resonator

Indexed keywords

CAPACITANCE-TO-VOLTAGE (C-TO-V) CONVERTER; DELTA MODULATORS; DOUBLE SAMPLING;

CAPACITANCE; DELTA MODULATION; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; RESONATORS; TIME DOMAIN ANALYSIS;

INTEGRATED CIRCUITS;

EID: 29044439950     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.859236     Document Type: Article

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