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Journal of Applied Physics

Volumn 103, Issue 5, 2008, Pages

Photocurrent measurements for oxide charge characterization of high- κ dielectric metal oxide semiconductor capacitors

(3) Felnhofer, D a Gusev, E P a Buchanan, D A b

a QUALCOMM INC (United States)

b UNIVERSITY OF MANITOBA (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CHARGE DENSITY; ELECTRIC VARIABLES MEASUREMENT; PHOTOCURRENTS; VOLTAGE CONTROL;

OXIDE CHARGE CHARACTERIZATION; PHOTOCURRENT MEASUREMENTS;

MOS CAPACITORS;

EID: 40949119983 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2841059 Document Type: Article

Times cited : (9)

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