Femtosecond laser micromilling of Si wafers

Applied Surface Science

Volumn 254, Issue 10, 2008, Pages 2996-3005

  Lee, Seongkuk ^a   Yang, Dongfang ^a   Nikumb, Suwas ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Ablation; Femtosecond laser; Micromilling; Silicon

Indexed keywords

ABLATION; LASER BEAM EFFECTS; POLARIZATION; SAPPHIRE; TITANIUM COMPOUNDS; ULTRASHORT PULSES;

CRATER PATTERNS; FEMTOSECOND LASER MICROMILLING; PULSE ENERGY; TOPOLOGICAL ANALYSIS;

SILICON WAFERS;

EID: 39449098199     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.10.063     Document Type: Article

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