High quality laser milling of ceramics, dielectrics and metals using nanosecond and picosecond lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6106, Issue , 2006, Pages

  Karnakis, Dimitris ^a   Rutterford, Graham ^a   Knowles, Martyn ^a   Dobrev, Todor ^b   Petkov, Petko ^b   Dimov, Stefan ^b  

^a OXFORD LASERS LTD   (United Kingdom)

^b CARDIFF UNIVERSITY   (United Kingdom)

Author keywords

Alumina; Ceramics; Copper vapour laser; Fused silica; Micromilling; Nanosecond; Picosecond; Steel; Tungsten

Indexed keywords

CERAMIC MATERIALS; DIELECTRIC MATERIALS; FUSED SILICA; LIGHT INTERFERENCE; MICROELECTRONICS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

COPPER-VAPOUR LASER; MICROMILLING; NANOSECOND; PICOSECOND;

LASER APPLICATIONS;

EID: 33646556691     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.645711     Document Type: Conference Paper

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