Characterisation of laser ablation of silicon using a Gaussian wavefront and computer generated wavefront reconstruction

Applied Surface Science

Volumn 229, Issue 1-4, 2004, Pages 148-160

  Coyne, E ^a,b   Magee, J P ^b   Mannion, P ^b   O'Connor, G M ^b   Glynn, T J ^b  

^a ANALOG DEVICES   (Ireland)

^b NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Characterisation; Laser ablation; Silicon

Indexed keywords

CHARACTERIZATION; DIFFRACTION; HOLOGRAMS; LASER ABLATION; LASER PULSES; MACHINING; SCANNING ELECTRON MICROSCOPY;

COMPUTER GENERATED HOLOGRAMS (CGH); GAUSSIAN WAVEFRONT; LASER HOLES; LASER MACHINING;

SILICON;

EID: 2342595157     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.01.068     Document Type: Article

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