Simulation of femtosecond laser ablation of silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5579, Issue PART 2, 2004, Pages 688-695

  Holenstein, Roman ^a   Kirkwood, Sean E ^a   Fedosejevs, Robert ^a   Tsui, Ying Y ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

Laser ablation; Molecular dynamics; Near IR; Silicon; Ultrafast

Indexed keywords

COMPUTER SIMULATION; CRYSTAL LATTICES; FLUIDIC DEVICES; MICROMACHINING; MOLECULAR DYNAMICS; PHOTONS; SILICON; SOLID STATE LASERS; ULTRAFAST PHENOMENA;

NEAR-INFRARED (IR); PHASE EXPLOSIONS; TRANSFER ENERGY; ULTRAFAST;

LASER ABLATION;

EID: 21944455956     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.567675     Document Type: Conference Paper

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