Micromachining of PZT using ultrafast femtosecond laser

Ferroelectrics, Letters Section

Volumn 32, Issue 3-4, 2005, Pages 67-77

  Uppal, Nitin ^a   Shiakolas, Panos S ^a   Priya, Shashank ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Femtosecond; Hard PZT; Laser; Micromachining; Piezoelectric; PZT; Soft PZT

Indexed keywords

ACTUATORS; LASERS; LEAD COMPOUNDS; TRANSDUCERS; ULTRASONIC DEVICES;

FEMTOSECOND; HARD PZT; PIEZOELECTRIC; PZT; SOFT PZT;

MICROMACHINING;

EID: 29144515335     PISSN: 07315171     EISSN: 15635228     Source Type: Journal    
DOI: 10.1080/07315170500311465     Document Type: Article

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