State of the art in prediction of mechanical behaviour of microsystems

Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

Volumn , Issue , 2004, Pages 287-294

  Lishchynska, Maryna ^a   Cordero, Nicolas ^a   Slattery, Orla ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CANTILEVER BEAMS; COMPUTER AIDED ENGINEERING; COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROSTRUCTURE; PARTIAL DIFFERENTIAL EQUATIONS; POISSON RATIO;

BEHAVIORAL MODELS; LOADING PARAMETERS; MICROSYSTEMS; NUMERICAL MODELING;

MICROELECTROMECHANICAL DEVICES;

EID: 3843054628     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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