Mechanical behavior and sound generation efficiency of prestressed, elastically clamped and thermomechanically driven thin film sandwiches

Journal of Micromechanics and Microengineering

Volumn 9, Issue 1, 1999, Pages 19-29

  Paul, Oliver ^a   Baltes, Henry ^b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ELASTIC MODULI; MATHEMATICAL MODELS; POISSON RATIO; SILICON; SPECIFIC HEAT; THERMAL EXPANSION; THERMAL STRESS; THIN FILMS; VIBRATIONS (MECHANICAL);

PRESTRESS; SOUND FIELD PRESSURE; THERMOMECHANICAL LINE STRESS; THIN FILM SANDWICHES;

MEMBRANES;

EID: 0033097360     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/1/002     Document Type: Article

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