Reduced-order models of stress-stiffened MEMS strucutres

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 493-496

  Varghese, Mathew ^a   Rabinovich, Vladimir L ^b   Senturia, Stephen D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Microcosm Technologies Inc   (United States)

Author keywords

Energy methods; Macromodels; MEMS; Modal methods; Stress stiffening

Indexed keywords

COMPUTATIONAL COMPLEXITY; COMPUTER SIMULATION; ELASTICITY; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; EQUATIONS OF MOTION; FUNCTIONS; MAGNETOSTATICS; NONLINEAR SYSTEMS; POTENTIAL ENERGY;

ELECTROSTATIC ENERGY DOMAINS; ENERGY METHODS; MACROMODELS; MODAL METHODS; STRESS-STIFFENING;

MICROELECTROMECHANICAL DEVICES;

EID: 6344265614     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Lynn D. Gabbay, Jan E. Mehner, and Stephen D. Senturia, "Computer-Aided Generation of Nonlinear reduced-Order Dynamic Macromodels: I. Non-Stress-Stiffened Case," J. Microelectromechanical Systems, in press.
2. Jan E. Mehner, Lynn D. Gabbay, and Stephen D. Senturia, "Computer-Aided Generation of Nonlinear reduced-Order Dynamic Macromodels: II Stress-Stiffened Case," J. Microelectromechanical Systems, in press.
3. MEMCAD, Microcosm Technologies, Cambridge, Massachusetts, http://www.memcad.com
4. MATLAB, The MathWorks, Inc., Natick, MA 01760, http://www.mathworks.com
5. SABER, Analogy, Inc. Beaverton, OR 97008, http://www.analogy.com