메뉴 건너뛰기




Volumn 9, Issue 3, 1999, Pages 236-244

On the buckling behavior of micromachined beams

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000241036     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/3/304     Document Type: Article
Times cited : (54)

References (13)
  • 1
    • 0030230992 scopus 로고    scopus 로고
    • Determining mean and gradient residual stresses in thin films using micromachined cantilevers
    • Fang W and Wicken J A 1996 Determining mean and gradient residual stresses in thin films using micromachined cantilevers J. Micromech. Microeng. 6 301-9
    • (1996) J. Micromech. Microeng. , vol.6 , pp. 301-309
    • Fang, W.1    Wicken, J.A.2
  • 2
    • 0001424495 scopus 로고
    • Novel microstructures for the in situ measurement of mechanical properties of thin films
    • Mehregany M, Howe R T and Senturia S D 1987 Novel microstructures for the in situ measurement of mechanical properties of thin films J. Appl. Phys. 62 3579-84
    • (1987) J. Appl. Phys. , vol.62 , pp. 3579-3584
    • Mehregany, M.1    Howe, R.T.2    Senturia, S.D.3
  • 3
  • 8
    • 33749944166 scopus 로고
    • A simple technique for the determination of mechanical strain in thin films with application to polysilicon
    • Guckel H, Randazzo T and Burns D W 1985 A simple technique for the determination of mechanical strain in thin films with application to polysilicon J. Appl. Phys. 57 1671-5
    • (1985) J. Appl. Phys. , vol.57 , pp. 1671-1675
    • Guckel, H.1    Randazzo, T.2    Burns, D.W.3
  • 10
    • 0000915839 scopus 로고
    • Detection of discontinuities in passivating layers on silicon by NaOH anisotropic etch
    • Pugacz-Muraszkiewicz I J 1972 Detection of discontinuities in passivating layers on silicon by NaOH anisotropic etch IBM J. Res. Dev. 16 523-9
    • (1972) IBM J. Res. Dev. , vol.16 , pp. 523-529
    • Pugacz-Muraszkiewicz, I.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.