Modeling and simulation for MEMS design, industrial requirements

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 6-9

  Neul, R ^a  

^a ROBERT BOSCH GMBH   (Germany)

Author keywords

Design flow; Design methods; Development process; MEMS; Modeling; Simulation

Indexed keywords

COMPUTER SIMULATION; INTEGRATED CIRCUITS; MATHEMATICAL MODELS; PRODUCT DESIGN; QUALITY ASSURANCE; SENSORS; SYSTEMS ANALYSIS;

DESIGN FLOW; DESIGN METHODS; DEVELOPMENT PROCESS;

MICROELECTROMECHANICAL DEVICES;

EID: 0242508497     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

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