3D coupled electro-mechanics for MEMS: applications of CoSolve-EM

Proceedings of the IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1995, Pages 122-127

  Gilbert, J R ^a   Legtenberg, R ^a   Senturia, S D ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; CONVERGENCE OF NUMERICAL METHODS; DEFORMATION; ELECTRIC CONDUCTORS; ELECTROSTATICS; NUMERICAL ANALYSIS; PERMITTIVITY; PROBLEM SOLVING; SENSORS; SURFACES; THREE DIMENSIONAL;

ELECTROSTATIC FORCES; SURFACE CONTACT; THREE DIMENSIONAL COUPLED ELECTROMECHANICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029194943     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)