Physically-based damping model for highly perforated and largely deflected torsional actuators

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 124-127

  Sattler, Robert ^a   Schrag, Gabriele ^a   Wachutka, Gerhard ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

Highly perforated devices; Mixed level modeling; Squeeze film damping; System simulation; Torsional actuators

Indexed keywords

COMPUTATION THEORY; COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; DAMPING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; NAVIER STOKES EQUATIONS; PLATES (STRUCTURAL COMPONENTS);

HIGHLY PERFORATED DEVICES; MIXED-LEVEL MODELING; SQUEEZE FILM DAMPING; SYSTEM SIMULATION; TORSIONAL ACTUATORS;

ACTUATORS;

EID: 3142734671     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. G. Schrag, G. Wachutka, "Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed-Level Scheme", Proc. of MSM '01, pp. 92-95.
2. W. Gross, "Fluid Film Lubrication", Wiley & Sons, New York, 1981.
3. T. Veijola et al., "Compact Model for Squeeze Film Damping including the Open Border Effect", Proc. of MSM'01, pp. 27-29.
4. S. Vemuri et al., "Low-order Squeeze-Film Model for Simulation of MEMS Devices", Proc. of MSM'00, pp. 205-208.
5. E.S. Hung, S. Senturia, "Generating Efficient Dynamical Models for Microelectromechanical Systems from a few Finite-Element Simulation Runs". J. Microelectromechanical Systems (1999), pp.120-130.
6. G. Schrag, G. Wachutka, "Physically-based Modeling of Squeeze Film damping by Mixed Level Simulation", accepted for publication in Sensors and Actuators A.
7. R. Sattler, F. Plötz, G. Wachutka, "Macromodeling of an Electrostatic Torsional Actuator", Transducers '01, pp. 248-251.
8. F. Plötz et al., "Performance and Dynamics of a RF MEMS Switch", Transducers '01, pp. 1560-1563.
9. R. Sattler, F. Plötz, S. Hoffmann, G. Wachutka, "System Level Modeling of an Electrostatic Torsional Actuator", Simulation of Semiconductor Processes and Devices 2001, Springer Verlag Wien New York, pp. 178-181.