Electron density and ion energy dependence on driving frequency in capacitively coupled argon plasmas

Journal of Physics D: Applied Physics

Volumn 40, Issue 22, 2007, Pages 7019-7023

  Zhu, Xi Ming ^a   Chen, Wen Cong ^a   Zhang, Shu ^b   Guo, Zhi Gang ^a   Hu, Da Wei ^a   Pu, Yi Kang ^a  

^a TSINGHUA UNIVERSITY   (China)

^b HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; GROUNDING ELECTRODES; IONIC STRENGTH; PLASMAS;

ARGON PLASMAS; DRIVING FREQUENCY; ELECTRON HEATING; ION ACCELERATION POWER; TRANSITION FREQUENCY;

CARRIER CONCENTRATION;

EID: 36448942232     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/22/023     Document Type: Article

References (30)

1. Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing 2nd edn (New York: Wiley)
2. Kitajima T, Takeo Y, Petrović Z Lj and Makabe T 2000 Appl. Phys. Lett. 77 489
3. Kim H C, Lee J K and Shon J W 2003 Phys. Plasmas 10 4545
4. Boyle P C, Ellingboe A R and Turner M M 2004 J. Phys. D: Appl. Phys. 37 697
5. Godyak V A, Piejak R B and Alexandrovich B M 1991 J. Appl. Phys. 69 3455
6. Beneking C 1990 J. Appl. Phys. 68 4461
7. Kitajima T, Takeo Y, Nakano N and Makabe T 1998 J. Appl. Phys. 84 5928
8. Yan M and Goedheer W J 1999 Plasma Sources Sci. Technol. 8 349
9. Amanatides E and Mataras D 2001 J. Appl. Phys. 89 1556
10. Abdel-Fattah E and Sugai H 2003 Japan. J. Appl. Phys. 42 6569
11. Löwe H D, Goto H H and Ohmi T 1991 J. Vac. Sci. Technol. A 9 3090
12. Surendra M and Graves D B 1991 Appl. Phys. Lett. 59 2091
13. Lee Y D, Kim S S, Ku S H and Chang C S 2000 Phys. Plasmas 7 766
14. Sobolewski M A 2001 J. Appl. Phys. 90 2660
15. You S J, Kim H C, Chung C W, Chang H Y and Lee J K 2003 J. Appl. Phys. 94 7422
16. Kikuchi T and Kogoshi S 2003 Japan. J. Appl. Phys. 42 4290
17. Perret A, Chabert P, Booth J P, Jolly J, Guillon J and Auvray Ph 2003 Appl. Phys. Lett. 83 243
18. Perret A, Chabert P, Jolly J and Booth J P 2005 Appl. Phys. Lett. 86 021501
19. Lee S H, Iza F and Lee J K 2006 Phys. Plasmas 13 057102
20. Wilken L, Hoffmann V and Wetzig K 2006 J. Appl. Phys. 99 063305
21. Godyak V A 1986 Soviet Radio Frequency Discharge Research (Falls Church, VA: Delphic Associates)
22. Hebner G A, Barnat E V, Miller P A, Paterson A M and Holland J P 2006 Plasma Sources Sci. Technol. 15 879
23. Ahn S K, You S J and Chang H Y 2006 Appl. Phys. Lett. 89 161506
24. Chabert P, Raimbault J L, Rax J M and Lieberman M A 2004 Phys. Plasmas 11 1775
25. Godyak V A and Sternberg N 1990 Phys. Rev. A 42 2299
26. Zhu X M and Pu Y K 2007 J. Phys. D: Appl. Phys. 40 2533
27. Lieberman M A, Booth J P, Chabert P, Rax J M and Turner M M 2002 Plasma Sources Sci. Technol. 11 283
28. Chabert P, Raimbault J L, Levif P, Rax J M and Lieberman M A 2006 Plasma Sources Sci. Technol. 15 S130
29. Godyak V A 2007 private communication
30. Godyak V A and Piejak R 1990 J. Vac. Sci. Technol. A 8 3833