Driving frequency effect on the electron energy distribution function in capacitive discharge under constant discharge power condition

Applied Physics Letters

Volumn 89, Issue 16, 2006, Pages

  Ahn, S K ^a   You, S J ^a   Chang, H Y ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON ENERGY LEVELS; MAXWELL EQUATIONS; NATURAL FREQUENCIES; PLASMAS;

CAPACITIVE DISCHARGE; DRIVING FREQUENCY; ELECTRON ENERGY DISTRIBUTION; MAXWELLIAN ELECTRON; POWER CONDITION; SEMICONDUCTOR PROCESSING;

GLOW DISCHARGES;

EID: 33750178109     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2363945     Document Type: Article

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