Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 10, 2003, Pages 6569-6577

  Abdel Fattah, Essam ^a   Sugai, Hideo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Bi Maxwellian distribution; Capacitively coupled plasma; Druyvesteyn distribution; Electron energy distribution function; Very high frequency

Indexed keywords

CAPACITANCE; ELECTRONS; HEATING; PLASMA SHEATHS; PLASMAS; SURFACE TREATMENT;

CAPACITIVELY COUPLED DISCHARGES; SURFACE HEATING;

GLOW DISCHARGES;

EID: 0346958647     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6569     Document Type: Article

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