Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar

Journal of Applied Physics

Volumn 84, Issue 11, 1998, Pages 5928-5936

  Kitajima, T ^a   Takeo, Y ^a   Nakano, N ^a   Makabe, T ^a  

^a KEIO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000469449     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368909     Document Type: Article

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