Radio frequency glow discharge source with integrated voltage and current probes used for evaluation of discharge parameters

Journal of Applied Physics

Volumn 99, Issue 6, 2006, Pages

  Wilken, L ^a   Hoffmann, V ^a   Wetzig, K ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC DISCHARGES; ELECTRODES; HEAT TREATMENT; THICKNESS MEASUREMENT;

DC DISCHARGES; PLASMA EQUIVALENT CIRCUITS; RADIO FREQUENCY GLOW DISCHARGE SOURCES; SHEATH VOLTAGE;

GLOW DISCHARGES;

EID: 33645667836     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2182077     Document Type: Article

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