Dependence of plasma density on driving frequency in conventional capacitively coupled discharges at higher frequencies

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 7 A, 2003, Pages 4290-4291

  Kikuchi, Takahito ^a   Kogoshi, Sumio ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Bi Maxwellian; Capacitively coupled plasma; Electron energy distribution function; Pic; Plasma density; Xpdp1

Indexed keywords

COMPUTER SIMULATION; ELECTRODES; ELECTRON TRANSPORT PROPERTIES; FREQUENCIES; INDUCTIVELY COUPLED PLASMA; MAXWELL EQUATIONS; MONTE CARLO METHODS;

CAPACITIVELY COUPLED PLASMA; DRIVING FREQUENCY; ELECTRON ENERGY DISTRIBUTION FUNCTION;

PLASMA DENSITY;

EID: 0141717985     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4290     Document Type: Article

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