Aluminum nitride contour-mode vibrating RF MEMS

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 664-667

  Piazza, Gianluca ^a   Stephanou, Philip J ^b   Pisano, Albert P ^b  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride; Bandpass filters; MEMS resonators; Piezoelectric resonators

Indexed keywords

ALUMINUM NITRIDE; FREQUENCY REFERENCE ELEMENTS; MICROMECHANICAL RESONATORS; MOTIONAL RESISTANCE;

BANDPASS FILTERS; ELECTRIC RESISTANCE; MOBILE DEVICES; PIEZOELECTRIC MATERIALS; SEMICONDUCTING ALUMINUM COMPOUNDS; SILICON; WIRELESS TELECOMMUNICATION SYSTEMS;

MEMS;

EID: 34250332629     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249702     Document Type: Conference Paper

References (13)

1. F. D. Bannon, et al., "High-Q HF microelectromechanical filters," IEEE Journal of Solid-State Circuits, vol. 35, pp. 512-26, 2000.
2. S. A. Bhave, et al., "Fully-differential poly-SiC Lame mode resonator and checkerboard filter," MEMS 2005, pp.223-6, 2005
3. S. Pourkamali, et al., "Electrostatically coupled micromechanical beam filters," MEMS 2004, pp.584-7, 2004.
4. W. Ark-Chew and C.-C. Nguyen, "Micromechanical mixer-filters ("mixlers")," Journal of Microelectromechanical Systems, vol. 13, pp. 100-12, 2004.
5. D. Weinstein, et al., "Dielectrically Transduced Single-Ended to Differential MEMS Filter," ISSCC 2006, pp. 318-319, 2006.
6. R. Ruby, et al., "Acoustic FBAR for filters, duplexers and front end modules," 2004 IEEE MTT-S, Vol.2, pp.931-4, 2004.
7. K. M. Lakin, et al., "Thin film bulk acoustic wave resonator and filter technology," Proceedings RAWCON 2001, pp.89-92, 2001.
8. D. T. Chang, et al., "A New MEMS-Based Quartz Resonator Technology," Hilton Head 2004, pp. 41-44, 2004.
9. P. J. Stephanou, et al., "Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter," Proceedings of ASME IMECE 2005, 2005.
10. G. Piazza and A. P. Pisano., "Dry-Released Post-CMOS Compatible Contour-Mode Aluminum Nitride Micromechanical Resonators for VHF Applications," Hilton Head 2004, pp. 37-40, 2004.
11. G. Piazza, et al., "Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications," MEMS 2005, pp.20-3, 2005.
12. G. Piazza, et al., "Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators," TRANSDUCERS '05, pp. 2065-2068, 2005.
13. P. J. Stephanou, et al., "Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters," MEMS 2006,pp. 906-909, 2006.