Mechanically coupled contour mode piezoelectric aluminum nitride MEMS filters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 906-909

  Stephanou, P J ^a   Piazza, G ^a   White, C D ^a   Wijesundara, M B J ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; ELECTROSTATICS; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; THIN FILM DEVICES;

ELECTROMECHNICAL COUPLING; MEMS FILTERS; TUNING ELEMENTS;

ELECTRIC FILTERS;

EID: 33750139730     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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