800 mhz low motional resistance contour-extensional aluminum nitride micromechanical resonators

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 60-61

  Stephanou, Philip J ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; III-V SEMICONDUCTORS; MICROMECHANICAL RESONATORS; MICROSYSTEMS; NATURAL FREQUENCIES; NITRIDES; Q FACTOR MEASUREMENT;

CONTOUR EXTENSIONAL; LATERAL DIMENSION; MICRO-MECHANICAL; MOTIONAL RESISTANCE; OPERATING FREQUENCY; SCALING-UP; STRUCTURAL LAYERS; WAVE FORMS;

SOLID-STATE SENSORS;

EID: 44949210052     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. K.M. Lakin et al., “Development of Miniature Filters for Wireless Applications,” IEEE Trans. on Microwave Theory and Tech., vol. 43, no. 12, pp. 2933-2939, 1995.
2. R. Ruby, et al., Y. Oshmyansky, “PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs),” Electronics Lett. 35, pp. 794, 1999.
3. J. Wang, C.T.-C. Nguyen, et al., “1.156-GHz Self-Aligned Vibrating Micromechanical Disk Resonator,” IEEE Trans. on UFFC, vol. 51, no. 12, pp. 1607-1628, 2004.
4. Y.-W. Lin,.T.-C. Nguyen, et al., “Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps,” IEEE Proc. Freq. Cont. Symposium and Exhibition, pp. 128-134, 2005.
5. G. Piazza, et al., "Single-chip multiple-frequency filters based on contour-mode aluminum nitride piezoelectric micromechanical resonators," TRANSDUCERS 2005, pp. 2065-2068, 2005.
6. P.J. Stephanou, et al., "Mechanically Coupled Contour Mode Piezoelectric Aluminum Nitride MEMS Filters," IEEE MEMS 2006, pp. 906-909, 2006.
7. G. Piazza, et al., "Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications," IEEE MEMS 2005, pp.20-3, 2005.