Thickness shear mode vibrations in silicon bar resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2005, Pages 898-901

  Chandrahalim, Hengky ^a   Weinstein, Dana ^a   Bhave, Sunil A ^a  

^a Department of Molecular Biology and Genetics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; DIELECTRIC DEVICES; ELECTROSTATICS; NATURAL FREQUENCIES; RESONATORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

QUALITY FACTOR (Q); QUARTER-WAVE THICKNESS; SILICON BAR RESONATOR; SILICON SUBSTRATE;

VIBRATIONS (MECHANICAL);

EID: 33847128343     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1602995     Document Type: Conference Paper

References (6)

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3. C.T.-C. Nguyen, et al, "Towards chip-scale atomic clocks," ISSCC 2005, pp. 84-85.
4. S. A. Bhave and R. T. Howe, "Silicon nitride-on-silicon bar resonator using internal dielectric transduction," Transducers 2005, pp. 2139-2142.
5. F.P. Stratton, et al, "A MEMS-based quartz resonator technology for GHz applications," Frequency Control Symposium 2004, pp. 27-34.
6. T. Mattila, et al, "Micromechanical bulk acoustic wave resonator," Ultrasonics Symposium 2002, pp. 945-948.