SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Chemical Physics

Volumn 127, Issue 16, 2007, Pages

The dissociative adsorption of silane and disilane on Si(100)-(2×1)

(3) Shi, J a Tok, E S a Kang, H Chuan a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMISORPTION; DENSITY FUNCTIONAL THEORY; FILM GROWTH; SURFACE REACTIONS;

PRECURSOR STATES; REFERENCE POINT;

SILANES;

EID: 36049009688 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.2799980 Document Type: Article

Times cited : (26)

References (51)

1
- 0035336882
- H. Rauscher, Surf. Sci. Rep. 42, 207 (2001).
- (2001) Surf. Sci. Rep , vol.42 , pp. 207
- Rauscher, H.¹

2
- 0000472948
- D.-S. Lin, E. S. Hirschorn, T.-C. Chiang, R. Tsu, D. Lubben, and J. E. Greene, Phys. Rev. B 45, 3494 (1992).
- (1992) Phys. Rev. B , vol.45 , pp. 3494
- Lin, D.-S.¹ Hirschorn, E.S.² Chiang, T.-C.³ Tsu, R.⁴ Lubben, D.⁵ Greene, J.E.⁶

3
- 0007026915
- S. M. Mokier, Crit. Rev. Surf. Chem. 4, 1 (1994).
- (1994) Crit. Rev. Surf. Chem , vol.4 , pp. 1
- Mokier, S.M.¹

4
- 36549096404
- R. J. Buss, P. Ho, W. G. Breiland, and M. E. Coltrin, J. Appl. Phys. 63, 2808 (1988).
- (1988) J. Appl. Phys , vol.63 , pp. 2808
- Buss, R.J.¹ Ho, P.² Breiland, W.G.³ Coltrin, M.E.⁴

5
- 0001305042
- T. R. Bramblett, Q. Lu, T. Karasawa, M.-A. Hasan, S. K. Jo, and J. E. Greene, J. Appl. Phys. 76, 1884 (1994).
- (1994) J. Appl. Phys , vol.76 , pp. 1884
- Bramblett, T.R.¹ Lu, Q.² Karasawa, T.³ Hasan, M.-A.⁴ Jo, S.K.⁵ Greene, J.E.⁶

6
- 0001181639
- X. F. Hu, Z. Xu, D. Lim, M. C. Downer, P. S. Parkinson, B. Gong, G. Hess, and J. G. Ekerdt, Appl. Phys. Lett. 71, 1376 (1997).
- (1997) Appl. Phys. Lett , vol.71 , pp. 1376
- Hu, X.F.¹ Xu, Z.² Lim, D.³ Downer, M.C.⁴ Parkinson, P.S.⁵ Gong, B.⁶ Hess, G.⁷ Ekerdt, J.G.⁸

7
- 0001511430
- S. M. Gates, C. M. Greenlief, D. B. Beach, and R. R. Kunz, Chem. Phys. Lett. 154, 505 (1989).
- (1989) Chem. Phys. Lett , vol.154 , pp. 505
- Gates, S.M.¹ Greenlief, C.M.² Beach, D.B.³ Kunz, R.R.⁴

8
- 0000535868
- S. M. Gates and S. K. Kulkarni, Appl. Phys. Lett. 58, 2963 (1991).
- (1991) Appl. Phys. Lett , vol.58 , pp. 2963
- Gates, S.M.¹ Kulkarni, S.K.²

9
- 0000469580
- M. Fehrenbacher, J. Spitzmüller, M. Pitter, H. Rauscher, and R. J. Behm, J. Appl. Phys. 36, 3804 (1997).
- (1997) J. Appl. Phys , vol.36 , pp. 3804
- Fehrenbacher, M.¹ Spitzmüller, J.² Pitter, M.³ Rauscher, H.⁴ Behm, R.J.⁵

10
- 0025720811
- M. Suemitsu, F. Hirose, and N. Miyamoto, J. Cryst. Growth 107, 1015 (1991).
- (1991) J. Cryst. Growth , vol.107 , pp. 1015
- Suemitsu, M.¹ Hirose, F.² Miyamoto, N.³

11
- 0029343993
- C. M. Greenlief and M. Armstrong, J. Vac. Sci. Technol. B 13, 1810 (1995).
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1810
- Greenlief, C.M.¹ Armstrong, M.²

12
- 51149217066
- M. Liehr, C. M. Greenlief, S. R. Kasi, and M. Offenberg, Appl. Phys. Lett. 56, 629 (1990).
- (1990) Appl. Phys. Lett , vol.56 , pp. 629
- Liehr, M.¹ Greenlief, C.M.² Kasi, S.R.³ Offenberg, M.⁴

13
- 0024715699
- J. H. Comfort and R. Reif, J. Electrochem. Soc. 136, 2386 (1989).
- (1989) J. Electrochem. Soc , vol.136 , pp. 2386
- Comfort, J.H.¹ Reif, R.²

14
- 84955033395
- L.-Q. Xia, M. E. Jones, N. Maity, and J. R. Engstrom, J. Vac. Sci. Technol. A 13, 2651 (1995).
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2651
- Xia, L.-Q.¹ Jones, M.E.² Maity, N.³ Engstrom, J.R.⁴

15
- 13244262882
- D. F. Kavulak, H. L. Abbott, and I. Harrison, J. Phys. Chem. B 109, 685 (2005).
- (2005) J. Phys. Chem. B , vol.109 , pp. 685
- Kavulak, D.F.¹ Abbott, H.L.² Harrison, I.³

16
- 0001244058
- A. R. Brown and D. J. Doren, J. Chem. Phys. 110, 2643 (1999).
- (1999) J. Chem. Phys , vol.110 , pp. 2643
- Brown, A.R.¹ Doren, D.J.²

17
- 0035894441
- J. K. Kang and C. B. Musgrave, Phys. Rev. B 64, 245330 (2001).
- (2001) Phys. Rev. B , vol.64 , pp. 245330
- Kang, J.K.¹ Musgrave, C.B.²

18
- 33748072758
- C.-L. Cheng, D.-S. Tsai, and J.-C. Jiang, Surf. Sci. 600, 3194 (2006).
- (2006) Surf. Sci , vol.600 , pp. 3194
- Cheng, C.-L.¹ Tsai, D.-S.² Jiang, J.-C.³

19
- 0033707209
- J. S. Lin and Y. T. Kuo, Thin Solid Films 370, 192 (2000).
- (2000) Thin Solid Films , vol.370 , pp. 192
- Lin, J.S.¹ Kuo, Y.T.²

20
- 1542273636
- J. S. Lin and L.-F. Lee, Int. J. Quantum Chem. 97, 736 (2004).
- (2004) Int. J. Quantum Chem , vol.97 , pp. 736
- Lin, J.S.¹ Lee, L.-F.²

21
- 0001321589
- E. Penev, P. Kratzer, and M. Sheffler, J. Chem. Phys. 110, 3986 (1999).
- (1999) J. Chem. Phys , vol.110 , pp. 3986
- Penev, E.¹ Kratzer, P.² Sheffler, M.³

22
- 0028416741
- Y. M. Wu and R. M. Nix, Surf. Sci. 306, 59 (1994).
- (1994) Surf. Sci , vol.306 , pp. 59
- Wu, Y.M.¹ Nix, R.M.²

23
- 0000239384
- S. M. Gates, Surf. Sci. 195, 307 (1988).
- (1988) Surf. Sci , vol.195 , pp. 307
- Gates, S.M.¹

24
- 0000675185
- R. Imbihl, J. E. Demuth, S. M. Gates, and B. A. Scott, Phys. Rev. B 39, 5222 (1989).
- (1989) Phys. Rev. B , vol.39 , pp. 5222
- Imbihl, R.¹ Demuth, J.E.² Gates, S.M.³ Scott, B.A.⁴

25
- 0031386876
- A. M. Lam, Y.-J. Zheng, and J. R. Engstrom, Surf. Sci. 393, 205 (1997).
- (1997) Surf. Sci , vol.393 , pp. 205
- Lam, A.M.¹ Zheng, Y.-J.² Engstrom, J.R.³

26
- 0026413846
- K. J. Uram and U. Jansson, Surf. Sci. 249, 105 (1991).
- (1991) Surf. Sci , vol.249 , pp. 105
- Uram, K.J.¹ Jansson, U.²

27
- 0034245791
- B. A. Ferguson, C. T. Reeves, D. J. Safarik, and C. B. Mullins, J. Chem. Phys. 113, 2470 (2000).
- (2000) J. Chem. Phys , vol.113 , pp. 2470
- Ferguson, B.A.¹ Reeves, C.T.² Safarik, D.J.³ Mullins, C.B.⁴

28
- 0000109099
- J. R. Engstrom, D. A. Hansen, M. J. Furjanic, and L.-Q. Xia, J. Chem. Phys. 99, 4051 (1993).
- (1993) J. Chem. Phys , vol.99 , pp. 4051
- Engstrom, J.R.¹ Hansen, D.A.² Furjanic, M.J.³ Xia, L.-Q.⁴

29
- 0001180828
- L.-Q. Xia, M. E. Jones, N. Maity, and J. R. Engstrom, J. Chem. Phys. 103, 1691 (1995).
- (1995) J. Chem. Phys , vol.103 , pp. 1691
- Xia, L.-Q.¹ Jones, M.E.² Maity, N.³ Engstrom, J.R.⁴

30
- 0040332245
- B. A. Ferguson, C. T. Reeves, D. J. Safarik, and C. B. Mullins, J. Appl. Phys. 90, 4981 (2001).
- (2001) J. Appl. Phys , vol.90 , pp. 4981
- Ferguson, B.A.¹ Reeves, C.T.² Safarik, D.J.³ Mullins, C.B.⁴

31
- 0007961960
- F. Bozso and Ph. Avouris, Phys. Rev. B 38, 3943 (1988).
- (1988) Phys. Rev. B , vol.38 , pp. 3943
- Bozso, F.¹ Avouris, P.²

32
- 0001563216
- S. M. Gates, C. M. Greenlief, and D. B. Beach, J. Chem. Phys. 93, 7493 (1990).
- (1990) J. Chem. Phys , vol.93 , pp. 7493
- Gates, S.M.¹ Greenlief, C.M.² Beach, D.B.³

33
- 21544473758
- S. M. Gates and C. M. Chiang, Chem. Phys. Lett. 184, 448 (1991).
- (1991) Chem. Phys. Lett , vol.184 , pp. 448
- Gates, S.M.¹ Chiang, C.M.²

34
- 0027656651
- A. C. Dillon, M. B. Robinson, and S. M. George, Surf. Sci. Lett. 295, L998 (1993).
- (1993) Surf. Sci. Lett , vol.295
- Dillon, A.C.¹ Robinson, M.B.² George, S.M.³

35
- 4544236018
- R. J. Hamers and Y. Wang, Chem. Rev. (Washington, D.C.) 96, 1261 (1996).
- (1996) Chem. Rev. (Washington, D.C.) , vol.96 , pp. 1261
- Hamers, R.J.¹ Wang, Y.²

36
- 0034251082
- M. Niwano, M. Shinohara, Y. Neo, and K. Yokoo, Appl. Surf. Sci. 162, 111 (2000).
- (2000) Appl. Surf. Sci , vol.162 , pp. 111
- Niwano, M.¹ Shinohara, M.² Neo, Y.³ Yokoo, K.⁴

37
- 0030109708
- L. Andersohn, Th. Berke, U. Köhler, and B. Voigtländer, J. Vac. Sci. Technol. A 14, 312 (1996).
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 312
- Andersohn, L.¹ Berke, T.² Köhler, U.³ Voigtländer, B.⁴

38
- 0032182263
- J. Braun, H. Rauscher, and R. J. Behm, Surf. Sci. 416, 226 (1998).
- (1998) Surf. Sci , vol.416 , pp. 226
- Braun, J.¹ Rauscher, H.² Behm, R.J.³

39
- 0031143859
- M. Suemitsu, H. Nakazawa, T. Morita, and N. Miyamoto, Jpn. J. Appl. Phys., Part 2 36, L625 (1997).
- (1997) Jpn. J. Appl. Phys., Part 2 , vol.36
- Suemitsu, M.¹ Nakazawa, H.² Morita, T.³ Miyamoto, N.⁴

40
- 0000188550
- M. Çakmak and G. P. Srivastava, Phys. Rev. B 61, 10216 (2000).
- (2000) Phys. Rev. B , vol.61 , pp. 10216
- Çakmak, M.¹ Srivastava, G.P.²

41
- 27644478225
- R. D. Smardon and G. P. Srivastava, J. Chem. Phys. 123, 174703 (2005).
- (2005) J. Chem. Phys , vol.123 , pp. 174703
- Smardon, R.D.¹ Srivastava, G.P.²

42
- 4243943295
- J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. 77, 3865 (1996).
- (1996) Phys. Rev. Lett , vol.77 , pp. 3865
- Perdew, J.P.¹ Burke, K.² Ernzerhof, M.³

43
- 0001550976
- D. M. Bylander and L. Kleinman, Phys. Rev. B 41, 907 (1990).
- (1990) Phys. Rev. B , vol.41 , pp. 907
- Bylander, D.M.¹ Kleinman, L.²

44
- 18244383188
- A. R. Brown and D. J. Doren, J. Chem. Phys. 109, 2442 (1998).
- (1998) J. Chem. Phys , vol.109 , pp. 2442
- Brown, A.R.¹ Doren, D.J.²

45
- 23744469218
- J. Shi, H. C. Kang, E. S. Tok, and J. Zhang, J. Chem. Phys. 123, 34701 (2005).
- (2005) J. Chem. Phys , vol.123 , pp. 34701
- Shi, J.¹ Kang, H.C.² Tok, E.S.³ Zhang, J.⁴

46
- 0000541655
- A. Vittadini, A. Selloni, and M. Casarin, Phys. Rev. B 49, 11191 (1994).
- (1994) Phys. Rev. B , vol.49 , pp. 11191
- Vittadini, A.¹ Selloni, A.² Casarin, M.³

47
- 0000963206
- Z. Jing and J. L. Whitten, Phys. Rev. B 44, 1741 (1991).
- (1991) Phys. Rev. B , vol.44 , pp. 1741
- Jing, Z.¹ Whitten, J.L.²

48
- 0000821355
- C. Yang and H. C. Kang, J. Chem. Phys. 110, 11029 (1999).
- (1999) J. Chem. Phys , vol.110 , pp. 11029
- Yang, C.¹ Kang, H.C.²

49
- 33847758265
- Q. Li, E. S. Tok, J. Zhang, and H. C. Kang, J. Chem. Phys. 126, 44706 (2007).
- (2007) J. Chem. Phys , vol.126 , pp. 44706
- Li, Q.¹ Tok, E.S.² Zhang, J.³ Kang, H.C.⁴

50
- 0001696238
- R. W. Price, E. S. Tok, and J. Zhang, Phys. Rev. B 59, R5292 (1999).
- (1999) Phys. Rev. B , vol.59
- Price, R.W.¹ Tok, E.S.² Zhang, J.³

51
- 33845558052
- R. Walsh, Acc. Chem. Res. 14, 246 (1981).
- (1981) Acc. Chem. Res , vol.14 , pp. 246
- Walsh, R.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.