Si2H6 adsorption and hydrogen desorption on Si(100) investigated by infrared spectroscopy

Applied Surface Science

Volumn 162, Issue , 2000, Pages 111-115

  Niwano, Michio ^a   Shinohara, Masanori ^a   Neo, Yoichiro ^a   Yokoo, Kuniyoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CHEMICAL BONDS; COMPUTER SIMULATION; CRYSTAL ATOMIC STRUCTURE; DESORPTION; DISSOCIATION; HYDROGEN; MOLECULAR STRUCTURE; OXIDATION; PYROLYSIS; SURFACE PHENOMENA; THIN FILMS;

SURFACE RECONSTRUCTION;

SILANES;

EID: 0034251082     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00178-1     Document Type: Article

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