Silicon deposition from disilane on Si(100)-2×1 : Microscopic model including adsorption

Journal of Applied Physics

Volumn 90, Issue 10, 2001, Pages 4981-4989

  Ferguson, B A ^a   Reeves, C T ^a   Safarik, D J ^a   Mullins, C B ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040332245     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1402141     Document Type: Article

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