Density functional study of silane adsorption onto Si(100) surface

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 192-198

  Lin, Jyh Shing ^a   Kuo, Yu Tzu ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; BUCKLING; CHEMICAL VAPOR DEPOSITION; DIMERS; MATHEMATICAL MODELS; NUMERICAL METHODS; PROBABILITY DENSITY FUNCTION; SEMICONDUCTING SILICON; SURFACE PHENOMENA;

ELONGATION; ENERGY BARRIER; REACTIVE STICKING;

SILANES;

EID: 0033707209     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00863-4     Document Type: Article

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