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Physical Review B - Condensed Matter and Materials Physics

Volumn 64, Issue 24, 2001, Pages 2453301-24533011

Theoretical study of the chemical vapor deposition of (100) silicon from silane

(2) Jeung, Ku Kang a Musgrave, Charles B a

a Stanford University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMER; HYDROGEN; SILANE; SILICON; SILICON DERIVATIVE;

ADSORPTION; ARTICLE; DENSITY; DESORPTION; MATHEMATICAL ANALYSIS; MOLECULAR WEIGHT; REACTION ANALYSIS; SURFACE PROPERTY; VAPOR;

EID: 0035894441 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (24)

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