Negative ions and the role of metastable molecules in a capacitively coupled radiofrequency excited discharge in oxygen

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 323-330

  Katsch, H M ^a   Sturm, T ^a   Quandt, E ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRIC DISCHARGES; ELECTRIC POTENTIAL; ELECTRODES; MOLECULES; NEGATIVE IONS; OXYGEN; PRESSURE EFFECTS;

CAPACITIVELY-COUPLED RADIO-FREQUENCY EXCITED DISCHARGES; LANGMUIR PROBES; PHOTODETACHMENT;

PLASMAS;

EID: 0034247502     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/310     Document Type: Article

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